Brand: AMAT Description: Semiconductor Board Card Condition: Brand New Certificate: COO TEST REPORT WARRANTY LETTER Warranty: 1 year Inventory Qty:9 Payment Term: T/T Shipping Port: Shenzhen As a Semiconductor Board Card, AMAT 0100-77040 ensures the positioning accuracy of wafers during high-speed transfer and ensures the reliability of vacuum sealing through closed-loop air pressure dynamic adjustment and millisecond-level signal response.
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Manufacture |
AMAT |
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Model Number |
0100-77040 |
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Country Of Origin |
USA |
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HS CODE |
85389000 |
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Dimension |
12*12*2cm |
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Packing Dimension |
14*14*4cm |
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Weight |
0.5kg |
Technical parameters
Input voltage: 100–240V AC
Communication interface: Ethernet, RS-485 (
Operating temperature range: -10℃ to +60℃
Protection level: IP20
Response time: ≤5ms
Compatible pneumatic pressure: 0.5–1.0MPa
Mechanical life: ≥1 million cycles
Functional features
1. High-precision pneumatic drive control
AMAT 0100-77040 uses closed-loop feedback technology to adjust the opening and closing degree and pressure output of pneumatic valves in real time to ensure the millimeter-level accuracy of the actions of actuators such as wafer transfer robotic arms and chamber seals, and reduce the risk of wafer damage.
2. Multi-protocol industrial communication integration
0100-77040 supports Ethernet, RS-485 and DeviceNet protocols to achieve seamless docking with the main control systems of AMAT Centura, Endura and other platforms. AMAT 0100-77040 It can synchronously transmit the equipment status data to the central monitoring unit to improve the automation level of the whole machine.
3. Anti-interference and fault self-diagnosis
The built-in electromagnetic shielding circuit and redundant circuit design can effectively resist radio frequency interference (RFI) and power supply fluctuations; it has real-time fault detection function, which can trigger sound and light alarms and record error codes when abnormal, shortening the maintenance cycle.
4 Modular rapid deployment
AMAT 0100-77040 adopts a standardized card slot installation structure, compatible with the head pneumatic unit of equipment such as AMAT P5000 and VIISta ion implantation platform, supports hot-swap replacement, and significantly reduces equipment downtime
Application scenarios
Wafer transfer system: drive the pneumatic gripper of the robotic arm to achieve high-speed wafer transfer between the vacuum chamber and the load lock (such as PVD/CVD equipment)
Process chamber sealing control: adjust the gate valve (Slit Valve) to maintain the vacuum isolation state of the etching/deposition chamber
